OPTICAL ELEMENT DRIVING APPARATUS, PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

摘要

An outer ring (21) is arranged in a barrel unit (14c). A driving mechanism (25) provided on the outer ring shifts an optical element (M), and adjusts the position and the tilt of the optical element. A damper mechanism (31) for suppressing propagation of vibration to the optical element is attached to the outer ring.