Actuator using piezoelectric element and method of driving the same

摘要

An actuator using a piezoelectric element (10) and a method of driving the same. The actuator includes at least one piezoelectric cell (10a,10d) moving by displacement according to an input voltage, at least one piezoelectric sensor (10b,10c) sensing the displacement of the at least one piezoelectric cell, an error detector (5) detecting an error in the at least one piezoelectric sensor, and a feedback signal generator (7) generating a feedback signal corresponding to the error, thereby performing micromirror driving and sensing.