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发明名称
Radiation-sensitive resin composition
摘要
申请公布号
EP1225480(B1)
申请公布日期
2010.03.17
申请号
EP20020001244
申请日期
2002.01.17
申请人
JSR CORPORATION
发明人
NISHIMURA, YUKIO;YAMAMOTO, MASAFUMI;KATAOKA, ATSUKO;KAJITA, TORU
分类号
G03F7/038;G03F7/039;G03F7/004
主分类号
G03F7/038
代理机构
代理人
主权项
地址
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