| 摘要 |
PROBLEM TO BE SOLVED: To solve a reduction problem of signals at the deceleration of electrons at the deceleration of charged particles to improve a resolution in a time-of-flight type analyzer. SOLUTION: In this time-of-flight type analyzer, the curvature center of a transmission type deceleration electrode having a curvature to apply deceleration potential is made coincided with a particle generating source or set on a side closer to a detector side from a particle generating position. COPYRIGHT: (C)2006,JPO&NCIPI |
