DEVICE AND METHOD FOR ADJUSTING COLLISION TIMING BETWEEN ELECTRON BEAM AND LASER LIGHT

摘要

An electron beam detection device (34) is arranged on an electron beam passing path so that a beam delay time t B from a passing moment of an electron beam (1) to a moment when the beam reaches a predicted collision point (9a) is longer than a laser delay time t L from a moment when a command for generating laser light (3) is issued to the moment when the laser light reaches the predicted collision point (9a) by at least a predetermined delay time ”t. The device (34) may detect passing therethrough without affecting the electron beam and output a laser light generation command from a laser light command delay circuit (36) when the predetermined delay time ”t (=t B -t L ) has elapsed after the detection.