发明名称 Analog capacitor and method of manufacturing the same
摘要 An analog capacitor capable of reducing the influence of an applied voltage on a capacitance and a method of manufacturing the analog capacitor are provided. The analog capacitor includes a lower electrode which is formed on a substrate, a multi-layered dielectric layer which includes at least one oxide layer and at least one oxynitride layer which are formed of a material selected from the group consisting of Hf, Al, Zr, La, Ba, Sr, Ti, Pb, Bi and a combination thereof and is formed on the lower electrode, and an upper electrode which is formed on the multi-layered dielectric layer.
申请公布号 US7679124(B2) 申请公布日期 2010.03.16
申请号 US20050187489 申请日期 2005.07.22
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 JEONG YONG-KUK;WON SEOK-JUN;KWON DAE-JIN;SONG MIN-WOO;KIM WEON-HONG
分类号 H01L27/108 主分类号 H01L27/108
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