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发明名称
Sputtering Device
摘要
申请公布号
KR100948205(B1)
申请公布日期
2010.03.16
申请号
KR20020066246
申请日期
2002.10.29
申请人
发明人
分类号
C23C14/34;H01J37/34
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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