发明名称 Wafer shipping container
摘要 A wafer shipping container has a first housing subcontainer. A second housing subcontainer mates with the first housing subcontainer to form a housing. The first housing subcontainer is substantially the same as the second housing subcontainer. A process carrier fits inside the housing.
申请公布号 US7677394(B2) 申请公布日期 2010.03.16
申请号 US20030339150 申请日期 2003.01.09
申请人 BROOKS AUTOMATION, INC. 发明人 CONARRO PATRICK ROONEY
分类号 B65D85/00;H01L21/673 主分类号 B65D85/00
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