| 摘要 |
<p>TO PROVIDE A LASER PROCESSING METHOD WHICH CAN HIGHLY ACCURATELY CUT A PLANAR OBJECT TO BE PROCESSED (1) HAVING AN IRREGULAR SURFACE AS AN ENTRANCE SURFACE (R) FOR PROCESSING LASER LIGHT (L). THIS LASER PROCESSING METHOD IRRADIATES A PLANAR OBJECT TO BE PROCESSED (1) WITH LASER LIGHT (L) WHILE LOCATING A LIGHT-CONVERGING POINT (P) WITHIN THE OBJECT (1), THEREBY FORMING MODIFIED REGIONS (71 TO 77) TO BECOME A STARTING POINT REGION FOR CUTTING ALONG LINES TO CUT (5). THE ENTRANCE SURFACE (R) FOR THE LASER LIGHT (L) IN THE OBJECT (1) IS AN IRREGULAR SURFACE. THE LINES TO CUT (5) EXTEND OVER A DEPRESSED AREA SURFACE (R2) AND A PROTRUDED AREA SURFACE (RL) IN THE ENTRANCE SURFACE (R). THE MODIFIED REGION (71) IS FORMED INSIDE BY A PREDETERMINED DISTANCE FROM THE DEPRESSED AREA SURFACE (R2). AT THE TIME OF IRRADIATION WITH LASER LIGHT (L) ALONG A PART ( 51 A) ON THE PROTRUDED AREA SURFACE (RL), THE LIGHT-CONVERGING POINT (P) IS LOCATED ON THE OUTSIDE OF THE OBJECT (1). THE MODIFIED REGION (72) IS FORMED INSIDE BY A PREDETERMINED DISTANCE FROM THE PROTRUDED AREA SURFACE (RL). AT THE TIME OF IRRADIATION WITH LASER LIGHT (L) ALONG A PART (51 B) ON THE DEPRESSED AREA SURFACE (R2), THE LIGHT-CONVERGING POINT (P) IS LOCATED ON THE OUTSIDE OF THE OBJECT (1).</p> |
