| 摘要 |
<p>PURPOSE: A substrate table mechanism apparatus, a substrate processing apparatus, and a control method and storage media of a substrate table mechanism apparatus are provided so that a substrate processing apparatus equipped with the substrate table mechanism apparatus, and this substrate table mechanism apparatus, and the control method and the computer-readable storage medium executing this control method in computer of the substrate table mechanism apparatus can be offered. CONSTITUTION: A substrate table mechanism apparatus, a substrate processing apparatus, and a control method and storage media of a substrate table mechanism apparatus comprises a main chuck(4), a first lifter(8a), and a second lifter(8b). The main chuck is equipped with a substrate. The external periphery portion of the processed substrate is supported. A second lifter supports a center area of a processed substrate than a location in which a first lifter supports the processed substrate.</p> |
