发明名称 |
SUBSTRATE TRANSPORT APPARATUS WITH MULTIPLE MOVABLE ARMS UTILIZING A MECHANICAL SWITCH MECHANISM |
摘要 |
A substrate transport apparatus including a frame, a drive section connected to the frame and including at least one independently controllable motor, at least two substrate transport arms connected to the frame and comprising arm links arranged for supporting and transporting substrates, and a mechanical motion switch coupled to the at least one independently controllable motor and the at least two substrate transport arms for effecting the extension and retraction of one of the at least two substrate transport arms while the other one of the at least two substrate transport arms remains in a substantially retracted configuration. |
申请公布号 |
KR20100029087(A) |
申请公布日期 |
2010.03.15 |
申请号 |
KR20097025576 |
申请日期 |
2008.05.08 |
申请人 |
BROOKS AUTOMATION, INC. |
发明人 |
HOFMEISTER CHRISTOPHER;KRUPYSHEV ALEXANDER;GILCHRIST ULYSSES;HOSEK MARTIN |
分类号 |
H01L21/677;B25J9/06;B65G49/07;B66C23/00 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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