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发明名称
METALLCARBID-GATESTRUKTUR UND HERSTELLUNGSVERFAHREN
摘要
申请公布号
AT460746(T)
申请公布日期
2010.03.15
申请号
AT20040812387T
申请日期
2004.11.29
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
CABRAL, CYRIL;DETAVERNIER, CHRISTOPHER;JAMMY, RAJARAO;SAENGER, KATHERINE
分类号
H01L21/8238;C23C14/06;C23C16/32;H01L27/108;H01L29/49
主分类号
H01L21/8238
代理机构
代理人
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