OPTICAL MODULATOR AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: An optical modulator and a method for manufacturing the same are provided to improve the attachment and the adhesive on an interface between a lower electrode and a ribbon layer by forming the lower electrode and the ribbon layer with a nitride-based compound thin film. CONSTITUTION: An insulation layer(130) is stacked on a substrate(110). The insulation layer is composed of a nitride-based compound with an insulation property. A buffer layer(120) is formed between the substrate and the insulation layer. A recessed part is formed on one side of a ribbon layer(140) which oppose to the substrate. First electrodes(151) are composed of a nitride-based compound thin film with a conductive property. The first electrodes are located on the both side of the ribbon layer. A second electrode(153) applies a driving voltage between the first electrodes.