发明名称 |
CHEMICAL SOLUTION PRE-DISCHARGING APPARATUS |
摘要 |
<p>PURPOSE: A chemical solution pre-discharging apparatus is provided to clean the external side of a priming roller by flowing solution which is discharged from a slit nozzle into a fluid injecting unit. CONSTITUTION: A priming roller(2) discharges a drug solution(R) from a slit nozzle(C1). A driving part rotates the priming roller. A cleaning bath(6) comprises a cleaning solution. The external lower part of the priming roller is dipped in the cleaning solution of the cleaning bath. A first fluid injecting portion(8) and a second fluid injecting portion(10) injects a cleansing solution and a dry solution the external side of the priming roller. The fluid removing unit collects the fluid for the cleaning solution or the dry solution.</p> |
申请公布号 |
KR20100028750(A) |
申请公布日期 |
2010.03.15 |
申请号 |
KR20080087622 |
申请日期 |
2008.09.05 |
申请人 |
DMS CO., LTD. |
发明人 |
LEE, SANG SU;OH, SANG TAEK |
分类号 |
H01L21/027 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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