发明名称 CHEMICAL SOLUTION PRE-DISCHARGING APPARATUS
摘要 <p>PURPOSE: A chemical solution pre-discharging apparatus is provided to clean the external side of a priming roller by flowing solution which is discharged from a slit nozzle into a fluid injecting unit. CONSTITUTION: A priming roller(2) discharges a drug solution(R) from a slit nozzle(C1). A driving part rotates the priming roller. A cleaning bath(6) comprises a cleaning solution. The external lower part of the priming roller is dipped in the cleaning solution of the cleaning bath. A first fluid injecting portion(8) and a second fluid injecting portion(10) injects a cleansing solution and a dry solution the external side of the priming roller. The fluid removing unit collects the fluid for the cleaning solution or the dry solution.</p>
申请公布号 KR20100028750(A) 申请公布日期 2010.03.15
申请号 KR20080087622 申请日期 2008.09.05
申请人 DMS CO., LTD. 发明人 LEE, SANG SU;OH, SANG TAEK
分类号 H01L21/027 主分类号 H01L21/027
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