发明名称 |
DREIACHSIGER BESCHLEUNIGUNGSMESSER MIT MEMBRAN |
摘要 |
The structure has a substrate (10), and a thin deformable elastic membrane (12) suspended above the substrate and integrated to the substrate at its periphery. A seismic mass (M) is suspended above the membrane and is connected to the membrane by a central pin. Capacitive interdigited combs are distributed around the mass and comprise movable armatures (AF1, AF3) integrated to the mass and fixed armatures (AM1, AM3) integrated the substrate. |
申请公布号 |
AT459888(T) |
申请公布日期 |
2010.03.15 |
申请号 |
AT20070103819T |
申请日期 |
2007.03.09 |
申请人 |
COMMISSARIAT A L'ENERGIE ATOMIQUE |
发明人 |
ROBERT, PHILIPPE;HENTZ, SEBASTIEN |
分类号 |
G01P15/125;G01P15/18 |
主分类号 |
G01P15/125 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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