发明名称 |
REDUCTION DE LA CONTAMINATION SUPERFICIELLE CAUSEE PAR DES RADIATIONS |
摘要 |
A process for mitigating or eliminating contamination and/or degradation of surfaces having common, adventitious atmospheric contaminants adsorbed thereon and exposed to radiation. A gas or a mixture of gases is introduced into the environment of a surface(s) to be protected. The choice of the gaseous species to be introduced (typically a hydrocarbon gas, water vapor, or oxygen or mixtures thereof) is dependent upon the contaminant as well as the ability of the gaseous species to bind to the surface to be protected. When the surface and associated bound species are exposed to radiation reactive species are formed that react with surface contaminants such as carbon or oxide films to form volatile products (e.g., CO, CO2) which desorb from the surface. |
申请公布号 |
AT460688(T) |
申请公布日期 |
2010.03.15 |
申请号 |
AT20000988384T |
申请日期 |
2000.12.21 |
申请人 |
EUV LIMITED LIABILITY CORPORATION |
发明人 |
KLEBANOFF, LEONARD;STULEN, RICHARD |
分类号 |
G03F7/20;B01J19/12;B08B7/00;G03F1/00;H01L21/027 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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