| 发明名称 |
FABLICATING METHOD OF CYLINDER HAVING FINE PATTERNS |
| 摘要 |
<p>PURPOSE: A method for manufacturing a cylinder with fine patterns is provided to form the fine patterns on a roll-shaped base layer by exposing a photo-resist layer on a cylinder using a laser. CONSTITUTION: A photo-resist layer is formed on a cylinder(S102). While the photo-resist layer is formed on the cylinder, a photosensitive solution is applied on the cylinder. Laser is radiated on the photo-resist layer to perform an expose process for the photo-resist layer(S103). The photo-resist layer is removed(S105). Fine patterns are formed on the cylinder.</p> |
| 申请公布号 |
KR20100028330(A) |
申请公布日期 |
2010.03.12 |
| 申请号 |
KR20080087316 |
申请日期 |
2008.09.04 |
| 申请人 |
KOREA INSTITUTE OF MACHINERY & MATERIALS |
发明人 |
JO, JEONG DAI;YU, JONG SU;KIM, DONG SOO |
| 分类号 |
H01L21/027;G03F7/039 |
主分类号 |
H01L21/027 |
| 代理机构 |
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