SEMICONDUCTOR PROCESS EQUIPMENT INCLUDING SUB WAFER HOLDER

摘要

PURPOSE: Semiconductor process equipment is provided to simultaneously transfer a plurality of wafer for a compound semiconductor using a sub-wafer holder. CONSTITUTION: Semiconductor process equipment includes a load-lock chamber(120), a process chamber(130), a slot valve(140) and a robot arm(160). A wafer load stand(180) enters into and comes out from the load-lock chamber. A sub-wafer holder is installed in the wafer load stand. The load-lock chamber and the process chamber are connected through the slot valve. The robot arm controls the sub-wafer holder.