| 摘要 |
PURPOSE: An apparatus and a method for forming a film, a substrate process apparatus and a computer-readable storage media are provided to detect the rotation position of a rotatable table using a position detection unit. CONSTITUTION: An apparatus for forming a film includes a rotatable table(2), a first reaction gas supply unit, a second reaction gas supply unit, a fist separation gas supply unit, a position detection unit and an area to be detected(25). A substrate is loaded on the rotatable table. The rotation position of the rotatable table is detected by the position detection unit. The area to be detected is arranged on the peripheral of the rotatable table and is detected by the position detection unit.
|
