| 摘要 |
PROBLEM TO BE SOLVED: To improve the ratio of the amount of light made incident to each pixel to the amount of light reaching a photoelectric converting part, and also to suppress the deterioration of mechanical strength in a waveguide structure. SOLUTION: An imaging sensor includes a pixel array with a plurality of pixels arrayed therein, each of which includes: the photoelectric converting part; and the waveguide structure where a plurality of insulating films enclose the side surfaces of a substance with a refractive index higher than that of the plurality of insulating films, in order to guide the light to the photoelectric converting part. The refractive index of the insulating film out of the plurality of insulating films, which encloses an area with the concentration of the light on the side surface of the substance, is smaller than that of the other insulating film. COPYRIGHT: (C)2010,JPO&INPIT
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