COATING DEVICE AND COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a coating device and a coating method by which the cost of a coated substrate is reduced by improving the operation rate of the coating device.

SOLUTION: The coating device includes: a stage on which the substrate is placed; a coating unit for applying a coating liquid on the substrate placed on the stage; a detection unit for detecting the foreign substances stuck on the substrate; and a controller for controlling the coating unit corresponding to the foreign substance information from the detection unit. The controller obtains a foreign substance positional information on the substrate from the foreign substance information from the detection unit and controls to drive the coating unit to avoid the foreign substance stuck on the substrate based on the foreign substance positional information.

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