| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a highly reliable surface acoustic wave device. <P>SOLUTION: The acoustic wave device is provided with: a piezoelectric board 10 on which an acoustic wave element 12 and an electrode pad 14 are formed; a first resin part 20 having a first opening part 22 formed on a functional area where acoustic wave of the acoustic wave element 12 is excited and a second opening part 24 formed on the electrode pad 14; a second resin part 30 formed on the fist resin part 20 so that it covers the first opening part 22 and has a third opening part 34 on the second opening part 24; and a metal layer 40 formed on the electrode pad 14 in the second opening part 24. In the device, surfaces in contact with the first opening part 22 and the second opening part 24 of the first resin part 20 are reverse-tapered. The method of manufacturing the device is also provided. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
