| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a planar actuator which detects the position of a movable part without being affected by a temperature and can be made compact in size. Ž<P>SOLUTION: The actuator includes: a frame-like fixed part 3 disposed on a device substrate 2; and a movable part 4 which is freely supported inside the fixed part 3 so as to be turnable via a torsion bar 5 and driven by a driving means, wherein a gate electrode 8 is disposed at one side of the movable part 4 which is not connected to the torsion bar 5, and a source electrode 9 and a drain electrode 10 are disposed so as to face the gate electrode 8. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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