| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a simple manufacturing method of an organic EL element capable of suppressing damages to the organic EL element in the manufacturing process, and to provide an organic EL element having a layered structure suitable for the manufacturing. Ž<P>SOLUTION: The organic electroluminescent element is manufactured by providing in the process of forming layers to constitute the organic EL element a step to install a metal doped molybdenum oxide layer to be arranged between an anode and an organic luminous layer in a first electrode part, and a step to form at least one layer to be laminated after the organic luminous layer is formed, out of the layers to constitute the first and the second electrode parts, by an electron beam deposition satisfying the conditions of formula (1): acceleration voltage × emission current ÷ vapor deposition speed <20,000 (Wsec/nm) and formula (2): acceleration voltage >4 (kV). Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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