发明名称 METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
摘要 A method for manufacturing a semiconductor device includes the steps of forming a P-type region on a surface of a semiconductor substrate, forming at least one Al electrode on the P-type region, forming an interlayer film in contact with the at least one Al electrode, the interlayer film being of a material which is less reactive with Si than is Al, and forming a semi-insulating film on the interlayer film, the semi-insulating film containing Si.
申请公布号 US2010062599(A1) 申请公布日期 2010.03.11
申请号 US20090395875 申请日期 2009.03.02
申请人 MITSUBISHI ELECTRIC CORPORATION 发明人 TAKANO KAZUTOYO;MURAKAMI JUNICHI;MINATO TADAHARU
分类号 H01L21/28 主分类号 H01L21/28
代理机构 代理人
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