| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a particle beam apparatus in which even if a film holding a testpiece is damaged, contamination inside an objective lens being an important performance portion arranged at a front end of a lens-barrel can be prevented, and the contaminated portion in the lens-barrel can be easily removed. <P>SOLUTION: The particle beam apparatus has a particle beam source and a particle beam passing pipe in which the particle beams from the particle beam source pass, and is provided with a lens-barrel which discharges the particle beams passing the particle beam passing pipe from the front end, and a vacuum chamber connected with the front end of the lens-barrel, and irradiates the particle beams discharged from the lens-barrel on the testpiece. A tubular member is arranged detachably inside the particle beam passing pipe which is located at the front end side of the lens-barrel. <P>COPYRIGHT: (C)2010,JPO&INPIT |
