| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that it takes a time to discriminate a distance, because many times necessary for completion of a back pressure rise are needed if the distance to an object to be detected becomes not more than 10 μm. SOLUTION: In a deposition distance determination device, a regulator 1 to be set a detection pressure is mounted inside or outside, and a two port solenoid valve 2 to cut a supply air is mounted. Further, in secondary side of the two port solenoid valve 2, a pressure transducer 3 (a pressure sensor, a pressure switch, a pressure transducer or the like) is mounted. A control circuit which controls the two port solenoid valve 2 and the pressure transducer 3 is installed. A piping into a detecting orifice which is prepared a detection surface of the object to be detected is mounted. And from the orifice 5 to the object to be detected, air is made to flow. For the two port solenoid valve 2, either normal open type or normal close type can be used, in this case, what is necessary is to control so as to intercept air, whenever performing detection on the control circuit. For an error due to temperature of the pressure transducer 3, correction can be made by using air temperature sensor inside the piping, and temperature sensor at outside of the piping. COPYRIGHT: (C)2010,JPO&INPIT
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