发明名称 |
PHOTO KEY AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE USING THE PHOTO KEY |
摘要 |
A photo key has a plurality of first regions spaced apart from one another on a semiconductor substrate, and a second region surrounding the first regions, and one of the first regions and the second region constitutes a plurality of photo key regions spaced apart from one another. Each of the photo key regions includes a plurality of first conductive patterns spaced apart from one another; and a plurality of second conductive patterns interposed between the first conductive patterns.
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申请公布号 |
US2010062548(A1) |
申请公布日期 |
2010.03.11 |
申请号 |
US20090475713 |
申请日期 |
2009.06.01 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
KWON BYOUNG-HO;HONG CHANG-KI;YOON BO-UN;LEE JAE-DONG;KIM SANG-JIN |
分类号 |
H01L21/66;H01L23/544 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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