| 摘要 |
PURPOSE: A double-sided inspection apparatus for dies is provided to inspect the front image and the rear image of each die with one apparatus using a front image inspection unit and a rear image inspection unit. CONSTITUTION: A double-sided inspection apparatus includes a loading-in unit(1), a front image inspection unit(3), a transparent glass, a rear image inspection unit(5), a pick-and place unit(6) and a control unit. The front image inspection unit inspects the front image of each die. The rear image inspection unit inspects the rear image of each die. The pick-and-place unit transfers the dies. Dies are classified based on the inspection result.
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