发明名称 HEAT TREATMENT DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a heat treatment device capable of suppressing wasteful energy consumption. SOLUTION: This heat treatment device 1 employs a heat pipe structure, and comprises a heat treatment plate 11 of a hollow structure, and a cooling plate 51 for control. The hydraulic fluid 16 of a hydraulic fluid storage section 13 is heated by operating a heater 17, thus the hydraulic fluid 16 is evaporated, its steam moves in a hollow section 10, and condensation latent heat is transferred and received by a plate surface 11a to heat the heat treatment plate 11. A part of the steam of the hydraulic fluid 16 flows into a hydraulic fluid circulation passage 18, and cooled by the cooling water supplied to a flow channel 54 by a cooling plate 51 for control. A cooling capacity of the cooling plate 51 for control is adjusted by controlling the opening/closing of a cooling water valve 57. Since the cooling plate 51 for control performs its cooling operation only when it is necessary to cool the steam of the hydraulic fluid 16, wasteful energy consumption can be suppressed. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010054103(A) 申请公布日期 2010.03.11
申请号 JP20080218315 申请日期 2008.08.27
申请人 SOKUDO CO LTD 发明人 MASUDA MITSUHIRO;GOTO SHIGEHIRO;SHIBA YASUHIRO;TSUJI MASAO
分类号 F28D15/02;H01L21/02;H01L21/683 主分类号 F28D15/02
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