| 摘要 |
PROBLEM TO BE SOLVED: To provide a cylindrical member fixing mechanism capable of surely fixing a cylindrical member, and a transfer device equipped with the same. SOLUTION: The gas introduced in the gas introducing space 1c of a gas introducing member 1 is introduced to an exterior part of the gas introducing member 1 through a plurality of gas outlet holes 1b, that is, to the space between the gas introducing member 1 and a flexible sheet 2. The space between one end part of the gas introducing member 1 and one end part of the flexible sheet 2, and the space between the other end part of the gas introducing member 1 and the other end part of the flexible sheet 2 are airtightly sealed. When the gas is introduced at the specified pressure or higher, the flexible sheet 2 is inflated to the outward by the pressure. Therefore, the outer peripheral surface of the flexible sheet 2 comes into a state of pressing the whole of the inner peripheral surface of a metal foil 4. As a result, the metal foil 4 is fixed to the gas introducing member 1. COPYRIGHT: (C)2010,JPO&INPIT |
