| 摘要 |
PROBLEM TO BE SOLVED: To carry out a normal decontamination step of an isolator body without passing through HEPA filters 20 and 24. SOLUTION: The isolator body 2 and a pass box 4 are connected and a communication opening 6 can be opened and closed by an internal door 6. The isolator body 2 and a decontamination gas supply apparatus 38 are connected through a decontamination gas supply path 46 and a decontamination gas discharge path 50 to constitute a circulation path. The gas flow-in part 16a and the discharge part 22a to/from the isolator body 2 are respectively provided with the HEPA 20 and 24. Also in the pass box 4, a circulation path having an approach path and a return path is constituted between the pass box 4 and the decontamination gas supply apparatus 38. Moreover, the isolator body 2 is provided with a second decontamination gas supply path 52 supplying the decontamination gas without passing through the HEPA filters. By opening the inner door 8, the decontamination gas is circulated through the pass box circulation path, and the decontamination gas is supplied from the second decontamination gas supply path 52 into the isolator body 2. COPYRIGHT: (C)2010,JPO&INPIT |
