发明名称 SENSOR ASSEMBLAGE AND METHOD FOR MANUFACTURING A SENSOR ASSEMBLAGE
摘要 A sensor assemblage, in particular a high-pressure sensor assemblage, includes a substrate element and a connector element, the substrate element comprising a sensor structure having a pressure-sensitive diaphragm and a cavity disposed in the region of the diaphragm, the substrate element being connected to the connector element in such a way that the cavity is connected to a hollow space of the connector element, the substrate element moreover including at least one further sensor structure having a pressure-sensitive further diaphragm and a further cavity disposed in the region of the further diaphragm, the further cavity being connected to a further hollow space of the at least one connector element or of a further connector element.
申请公布号 US2010058873(A1) 申请公布日期 2010.03.11
申请号 US20090555587 申请日期 2009.09.08
申请人 KLOPF FRANK;STOETZLER ARNO;KOBER JUERGEN 发明人 KLOPF FRANK;STOETZLER ARNO;KOBER JUERGEN
分类号 G01L7/08;B23P11/00;G01R3/00;H01C17/00 主分类号 G01L7/08
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