| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a rotation oscillation gyroscope for eliminating effect of noise, based on a support structure of a movable section. <P>SOLUTION: The rotation oscillation gyroscope includes a drive spindle 4, a drive electrode 3 for rotating and oscillating the drive spindle 4, a detection spindle 5 that is arranged inside the drive spindle 4 and oscillates in a seesaw manner about the Y-axis together with the drive spindle 4 by Coriolis force when the angular velocity around the X-axis is received. an anchor 6 disposed projectedly on a substrate 2, a plurality of coupling support springs 8 that have an absorbing function of rotation and oscillation and a transmitting function of the Coriolis force and couple the drive spindle 4 to the detection spindle 5 and support it, a pair of twist support springs 7 that are suspended between the anchor 6 and detection spindle 5 on the Y-axis, function as a hinge shaft of the oscillating detection spindle 5, and are arranged so that the axial center pass the center of gravity of the movable section 10, and a pair of detection electrodes 9 for detecting the displacement of the oscillating detection spindle 5. <P>COPYRIGHT: (C)2010,JPO&INPIT |
