ACTIVATED CARBON FILTER DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technology which can stabilize the concentration of volatile organic compounds contained in exhaust gas supplied to an adsorption concentration device.

SOLUTION: An activated carbon filter device includes a filter device body 510 through which exhaust gas discharged from a predetermined zone 111 generating volatile organic compounds passes. The filter device body 510 includes activated carbon cartridges 530 having a function of adsorbing and retaining a part of the volatile organic compounds contained in the exhaust gas discharged from the predetermined zone 111 and releasing a part of the adsorbed and retained volatile organic compounds when the concentration of the volatile organic compounds contained in the exhaust gas is low.

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