| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and a device for measuring surface roughness capable of performing it inside a processing device, and to provide the processing device performing the surface roughness measurement in process. SOLUTION: Two contact type distance sensors 55 are provided oppositely by 180° to each other on a cylindrical measuring head 51 attachable to a main spindle 21 of the processing device, inserted into a cylindrical hole processed by a workpiece when measuring, and rotating in the circumferential direction, and also two air nozzles 56 for an air micrometer are provided oppositely by 180° to each other. A first inner diameter A of the cylindrical hole is sought by the two contact type distance sensors 55 along the circumferential direction, and a second inner diameter B of the cylindrical hole is sought by the air micrometer along the circumferential direction, thus surface roughness in the same position in the circumferential direction is sought from the difference (B-A) in the same position in the circumferential direction. COPYRIGHT: (C)2010,JPO&INPIT |
