SUBSTRATE TREATMENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a heat treatment device capable of preventing the contamination of the inside of a furnace since dirt on the floor is adhered to a sealing surface and is brought into the furnace when placing a quartz component on the floor. SOLUTION: The heat treatment device includes: a reaction tube comprising an outer tube 14 and an inner tube formed of quartz; a first junction surface for airtightly joining an area between the outer tube and a manifold 50 formed of quartz; a second junction surface for airtightly joining an area between the manifold and a seal cover 31 formed of quartz; and a third junction surface for airtightly joining an area between the seal cover and a seal cap 30. The heat treatment device includes an O ring 53 on at least one junction surface of the first, second, and third junction surfaces, and a projection outside the O ring section of the junction surface. COPYRIGHT: (C)2010,JPO&INPIT