METHOD OF NANOSCALE PATTERNING USING BLOCK COPOLYMER PHASE SEPARATED NANOSTRUCTURE TEMPLATES

摘要

A method of forming nanostructures using block copolymer nanostructure templates is disclosed herein. The method includes forming a nanostructure template by patterning a block copolymer on a substrate and allowing the block copolymer to phase separate to form the nanostructure template. The nanostructure template can then be loaded with a nanostructure precursor material. The nanostructure template is removed to form the nanostructure.