MANUFACTURING APPARATUS AND MANUFACTURING METHOD FOR ALINED CARBON NANOTUBES

摘要

An apparatus (CVD apparatus (1)) having a reaction chamber (3) for accommodating a substrate (2) formed with a metal catalyst film and means (gas supply pipes (5, 6)) for supplying a feedstock gas (9) and a catalyst activating material (10) into the reaction chamber (3) for manufacturing CNTs aligned in a direction perpendicular to the catalyst film surface (2a) of the substrate (2), wherein the means for supplying the feedstock gas (9) and the catalyst activating material (10) have a plurality of ejection holes placed at positions facing the catalyst film surface (2a) of the substrate (2), and the ejecting direction of the ejection holes is adjusted to the direction of alignment of CNTs grown from the metal catalyst film. This can provide a manufacturing technology for CNTs capable of mass-producing aligned CNTs at lower cost.