发明名称 BEARING SYSTEM OR A SEALING SYSTEM USING A CARBON BASED SLIDING MEMBER
摘要 An object of the present invention is to provide a bearing system or a sealing system which has excellent durability when used with the purified water as a lubricating liquid. The present invention relates to a purified water-lubricated bearing system or a purified water-lubricated sealing system having a movable member and a stationary member, in which purified water having an electrical resistance in a range of 1-18.25 M&OHgr;cm is used as a lubricating liquid. The bearing system or the sealing system is characterized in that a diamond-like carbon film is formed over a slide surface of at least one of said movable member and said stationary member.
申请公布号 US2010061676(A1) 申请公布日期 2010.03.11
申请号 US20080595896 申请日期 2008.04.18
申请人 EBARA CORPORATION 发明人 SUGIYAMA KENICHI;NAGASAKA HIROSHI
分类号 F16C33/12 主分类号 F16C33/12
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