| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent particles formed from a raw material for producing a film from adhering to a pipe or the like, and to make the raw material for producing a film harmless. <P>SOLUTION: A treatment medium comprising a super-critical fluid wherein a raw material for producing a film is dissolved, is introduced into a cooling device 17 from a chamber 16 and is cooled by the cooling device 17 to the critical temperature or below, to convert the supercritical fluid into a liquid solvent 40. Thus, the liquid solvent 40 and the raw material are separated. Subsequently, the liquid solvent 40 and the raw material are introduced into a trap 18, to dissolve the raw material in a trap solvent 30 disposed in the trap 18. Thereafter, the liquid solvent 40 is introduced into a pressure-reducing valve 19 from the trap 18 and is vaporized by reducing the pressure thereof by virtue of the pressure-reducing valve 19. Hence, the raw material is recovered and the liquid solvent 40 alone can be vaporized, and therefore particles resulting from the nucleation of the raw material is not generated. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
