| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an emitter of a field emission electron having a carbon film structure, which suppresses local electric field concentration, prevents current deterioration and a discharge phenomenon which accompanies thermal deterioration, suppresses the dispersion of electron emission, provides a desired function in a field emission device which applies the emitter, and to provide a field emission device that applies the emitter which fulfills a desired function and provides a more practical product. <P>SOLUTION: The electron emitter is provided with a guard electrode 13 on an outer circumference side of the carbon film structure 10, formed on a substrate 7 by a plasma CVD method. The guard electrode 13 includes a convex-curved surface part (a curved-surface part which is curved to the opposite side, in the film-forming direction) 13a in a film-forming direction of the carbon film structure 10. The guard electrode having the curved surface part 13a, of which the curvature radius R1 on the outer circumference side of the guard electrode 13 is larger than a curvature radius R2 on a carbon film structure side, is applied. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
