发明名称 METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To reduce a leakage current of a PN-junction diode for protecting a longitudinal transistor. Ž<P>SOLUTION: A semiconductor device is manufactured by the steps of: preparing an SOI substrate made by laminating a first single crystal semiconductor substrate and a second single crystal semiconductor substrate with intervening an oxide film; forming a PN-junction diode at the side of the first single crystal semiconductor substrate; removing part of the first single crystal semiconductor substrate and part of the oxide film so as to expose the second single crystal semiconductor substrate at its area in which a longitudinal transistor is formed; forming the longitudinal transistor in the second single crystal semiconductor substrate; and electrically connecting the PN-junction diode to the longitudinal transistor. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010056362(A) 申请公布日期 2010.03.11
申请号 JP20080220810 申请日期 2008.08.29
申请人 NEC ELECTRONICS CORP 发明人 OTANI KINYA
分类号 H01L27/04;H01L21/336;H01L29/739;H01L29/78 主分类号 H01L27/04
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