发明名称 SAMPLE HOLDER, SAMPLE CARRYING MECHANISM WITH SAMPLE HOLDING MECHANISM, AND CHARGED PARTICLE RADIATION DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a sample holder having a mechanism converting the dead weight of a sample to pressing action to hold the sample and stably holding the sample regardless of the size of the sample. Ž<P>SOLUTION: In order to solve the problem, the sample holder holding the sample by pressing the sample by the sample pressing mechanism and using two levers is proposed. The two levers includes a first lever receiving pressing force exerted by the dead weight when the sample is put on the sample holder and a second lever using the pressing force from the first lever as pressing force pressing a sample end. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010056255(A) 申请公布日期 2010.03.11
申请号 JP20080218953 申请日期 2008.08.28
申请人 HITACHI HIGH-TECHNOLOGIES CORP 发明人 ONO KAZUYUKI;KANZAKI NOBUHIKO
分类号 H01L21/66;H01J37/20 主分类号 H01L21/66
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