发明名称 |
SAMPLE HOLDER, SAMPLE CARRYING MECHANISM WITH SAMPLE HOLDING MECHANISM, AND CHARGED PARTICLE RADIATION DEVICE |
摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sample holder having a mechanism converting the dead weight of a sample to pressing action to hold the sample and stably holding the sample regardless of the size of the sample. Ž<P>SOLUTION: In order to solve the problem, the sample holder holding the sample by pressing the sample by the sample pressing mechanism and using two levers is proposed. The two levers includes a first lever receiving pressing force exerted by the dead weight when the sample is put on the sample holder and a second lever using the pressing force from the first lever as pressing force pressing a sample end. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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申请公布号 |
JP2010056255(A) |
申请公布日期 |
2010.03.11 |
申请号 |
JP20080218953 |
申请日期 |
2008.08.28 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORP |
发明人 |
ONO KAZUYUKI;KANZAKI NOBUHIKO |
分类号 |
H01L21/66;H01J37/20 |
主分类号 |
H01L21/66 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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