发明名称 X-RAY TUBE AND FLUORESCENCE X-RAY SPECTROSCOPIC ANALYZER USING SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide an X-ray tube which can irradiate a minute region of a sample with X-rays and does not decrease the intensity. Ž<P>SOLUTION: The X-ray tube 1 includes: a focusing electrode (cathode) 5, in which a filament 1 having a recess 6 in a housing 2 is disposed; a filament 3 that is fixed so as to emit thermoelectron and to be disposed in the groove of the recess of the focusing electrode (cathode) 5; an anodic electrode 11 that has a tip on which a target 4, with which an electron beam including the thermoelectron collides, is disposed; and an X-ray emission window 8 that is disposed so as to cover an opening formed in the housing 2 for transmission of X-rays so as to emit primary X-rays generated on the target 4. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010055883(A) 申请公布日期 2010.03.11
申请号 JP20080218425 申请日期 2008.08.27
申请人 SII NANOTECHNOLOGY INC 发明人 AIDA KAZUO;NAKAGAWA YOSHITOMO;OBA HIROSHI
分类号 H01J35/06;G01N23/223 主分类号 H01J35/06
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