| 摘要 |
<P>PROBLEM TO BE SOLVED: To correctly detect a protrusion on a medium even when an object to be inspected is a patterned medium. Ž<P>SOLUTION: The figures are represented by: (A) is a plan view on the side opposed to a medium; (B) is a side view; and (C) is a front view. As shown by (A) of Fig.2, a slider 10 includes a rail 11 for floating and a rail 12 for floating. The slider 10 receives an air flow in a direction shown by an arrow of Fig.2 during floating. Air flow-out end sides of the rail 11 for floating and the rail 12 for floating have inclinations to the air flow. Specific inclinations are preferably 30 to 60°. Further as shown by (B) and (C) of Fig.2, the rail 11 for floating and the rail 12 for floating have inner side protruding structures so that thicknesses are made maximum at a point 13 and a point 14. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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