| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a multi-layered film coated member which suppresses a welding phenomenon, and has characteristics of wear resistance and resistance to high temperature oxidation. Ž<P>SOLUTION: In the multi-layered film coated member having two or more layers of hard films 1 on a surface of a substrate 2, the hard film 1 has a first hard film 4 which is an outer layer and a second hard film 3 which is an inner layer, the first hard film 4 is an SiBNCO based film, the second hard film 3 has two or more of metal components selected from among Al, Ti, Cr, Nb, W, Si, V, Zr and Mo and one or more of non-metal components selected from among N, boron, C, O and S. A surface layer of the first hard film 4 satisfies inequality of 9≤α/β≤22 wherein an area calculated from a peak showing an Si-C bond is represented by α, and an area calculated from a peak showing an Si-O bond is represented by β, and satisfies inequality of 5≤X/Y≤12 wherein an area calculated from a peak showing a B-N bond is represented by X, an area calculated from a peak showing an B-O bond is represented by Y, and a ratio of them is represented by X/Y. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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