| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing ultrafine particles, for reducing contaminations and improving purity. Ž<P>SOLUTION: The method of manufacturing ultrafine particle powder includes: a first step of pulverizing an object to be pulverized by beads chemically soluble to acid and obtaining pulverized objects; a second step of dissolving the worn powder of the beads generated by pulverizing in the first step by the acid; and a third step of separating a solution in which the worn powder is dissolved in the second step and the pulverized objects generated in the first step by dialysis treatment. The ultrafine particles of high purity metal, intermetallic compound or ceramic, whose particle diameter is ≤1 μm, are obtained. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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