发明名称 |
Method of Separating Light-Emitting Diode from a Growth Substrate |
摘要 |
A method of forming a light-emitting diode (LED) device and separating the LED device from a growth substrate is provided. The LED device is formed by forming an LED structure over a growth substrate. The method includes forming and patterning a mask layer on the growth substrate. A first contact layer is formed over the patterned mask layer with an air bridge between the first contact layer and the patterned mask layer. The first contact layer may be a contact layer of the LED structure. After the formation of the LED structure, the growth substrate is detached from the LED structure along the air bridge.
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申请公布号 |
US2010062551(A1) |
申请公布日期 |
2010.03.11 |
申请号 |
US20090554578 |
申请日期 |
2009.09.04 |
申请人 |
CHEN DING-YUAN;LIN HUNG-TA;YU CHEN-HUA;CHIOU WEN-CHIH |
发明人 |
CHEN DING-YUAN;LIN HUNG-TA;YU CHEN-HUA;CHIOU WEN-CHIH |
分类号 |
H01L27/15 |
主分类号 |
H01L27/15 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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