SCANNING TYPE CHARGED PARTICLE MICROSCOPE DEVICE AND METHOD FOR PROCESSING IMAGE ACQUIRED WITH SCANNING TYPE CHARGED PARTICLE MICROSCOPE DEVICE

摘要

A method for processing an image acquired with a scanning type charged particle microscope device acquires a plurality of images (Iin, 1 through Iin, n) of a sample picked up by means of the scanning type charged particle microscope device under different pickup conditions (1 through n) of the images of the sample, generates deterioration functions (A1 through An) corresponding to the plurality of the images, and generates an image (Iout) to improve resolution of the sample by using the plurality of the images and the plurality of the deterioration functions.  Thus, since the method for processing the image acquired with the scanning type charged particle microscope device can obtain an image that is higher in resolution than an image obtained by imaging a sample under a single pickup condition, it is possible to observe a fine structure of the sample and to carry out the high accurate calculation of characteristic amounts.